Temperature and humidity sensor based on MEMS technology
نویسندگان
چکیده
This work presents a monolithically integrated temperature and humidity sensor based on microelectromechanical systems technology. The working the “bi-metallic” effect has advantages of wide range, high sensitivity, fast detection. polyimide parallel plate capacitive structure with microporous array upper electrode designed for sensitivity response. Numerical analysis COMSOL simulation showed that detection is 0.2 mV/°C in range 193–393 K 0.405 pF/% relative (RH) response time 34 s 0%–100% RH. small dimension, precision,
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ژورنال
عنوان ژورنال: AIP Advances
سال: 2021
ISSN: ['2158-3226']
DOI: https://doi.org/10.1063/5.0053342